Products

Products
RF Accessories

RF Accessories

Beyond essential RFG and RFM systems, ASENDIA offers auxiliary devices that further improve plasma process efficiency.
Portable equipment enables rapid and flexible response during process evaluations.

ASENDIA provides total RF solution for customers with appropriate support. All RF Products are designed with deep thoughts
from customers' view.

Features

  • Matcher Portable
    Controller Features

    Compact & portable size

    Easy to control & engineer friendly

    Rechargeable

  • RF Filter

    All Customize

    Very High Rejection ( < -50dB )

    350kHz ~ 200MHz

  • CEX Controller Features

    Supply synchronized frequency

    Remove crosstalk in multi-zone reactor

    Simple design & easy to control

    350kHz ~ 100MHz

    4 channel RF output

  • Pulse Controller Features

    Multi-channel output (8 channel)

    Wide variable frequency range
    (1Hz - 100kHz)

    RS-232C, D-net control function

  • Stabilizer Features

    Voltage & Current auto,
    manual control function

    Vrms & Irms measurement
    & precise control ≤ 1pF

    Customization for customers