RF Matcher
고주파 전력을 프로세스 챔버에 효율적으로 공급하기 위한 임피던스 매칭 장치
당사는 최대 1msec 이하의 매칭 속도를 제공하는 기술 보유
Features
-
Continuous and
pulsed RF Matching -
Flexible in
customization -
EtherCAT interface
-
Auto preset &
Multi-preset -
New Technologies
(Quantum + Matching)
Specifications
| AFC Series | AQC Series | |
| Shape | Customized design for each chamber | |
| Frequency Range | 350kHz - 100MHz | |
| Max PF Input Range | 10kW (With the exception of some areas) | |
| Matching Time | Within 1sec from preset position with RF input stable | |
| Matching Accuracy | 5W or less than 1% of the set power, whichever is greater | |
| Interface | RS-232C / RS-485 / EtherNet (Option : Analog / D-Net / EtherCAT) | |
| Function | CW, Pulse, VF, Quantum Matching | |
| Power Supply | AC220V (0.5A or 1A) or DC24V (4A or 6A) | |
| Safety features | Coaxial cable not connected, FAN Alarm, Motor Alarm, Temp Alarm | |
| Cooling Method | Air Cooling or Water Cooling | |