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제품
RF Accessories

RF Accessories

플라즈마 공정에 필요한 RFG, RFM 외에 공정 효율 증대를 위한 주변 장치
플라즈마 공정 평가 진행 시 휴대용 장치를 사용함으로써 신속한 대응 가능

Features

  • Matcher Portable
    Controller Features

    Compact & portable size

    Easy to control & engineer friendly

    Rechargeable

  • RF Filter

    All Customize

    Very High Rejection ( < -50dB )

    350kHz ~ 200MHz

  • CEX Controller Features

    Supply synchronized frequency

    Remove crosstalk in multi-zone reactor

    Simple design & easy to control

    350kHz ~ 100MHz

    4 channel RF output

  • Pulse Controller Features

    Multi-channel output (8 channel)

    Wide variable frequency range
    (1Hz - 100kHz)

    RS-232C, D-net control function

  • Stabilizer Features

    Voltage & Current auto,
    manual control function

    Vrms & Irms measurement
    & precise control ≤ 1pF

    Customization for customers